RF & DC Magnetron Sputtering with Thermal Evaporation System
Model Name: Auto 500
Company Name: HHV Advance Technologies Pvt. Ltd.
About:
The Auto 500 system combines RF and DC magnetron sputtering with thermal evaporation capabilities, enabling the growth or deposition of uniform thin films on substrates. It supports various deposition parameters, such as substrate temperature, environment, deposition rate, power, and substrate-to-target distance.
Salient Features:
- Versatile front-loading coating system with a box chamber.
- AEquipped with RF (300W, 13.56 MHz) and DC (1KW) magnetron sources for diverse thin film applications.
- Adjustable substrate temperature from room temperature to 500°C.
- Thin film deposition under Argon and Nitrogen environments.
Applications:
- Anti-reflective coatings, semiconductor industries, photonics research, compound semiconductors, solar cells, and nanotechnology.